In a groundbreaking achievement, the San Francisco-based startup Inversion Semiconductor has successfully developed a compact particle accelerator that boasts an astonishing light output of up to 10 kW, a staggering 33 times higher than the capabilities of systems developed by ASML. This revolutionary device is a mere 1000 times smaller than traditional particle accelerators and leverages the cutting-edge technology of laser wakefield acceleration (LWFA) to generate radiation with a wavelength ranging from 20 to 6.7 nanometers. This remarkable innovation has the potential to accelerate chip production by a factor of 15 or enable the simultaneous use of multiple lithography systems, thereby significantly reducing costs.

However, the technology requires the use of expensive and energy-hungry petawatt-class lasers, which poses a significant challenge. Moreover, Inversion Semiconductor lacks experience in developing lithographic systems, making it essential for the company to either collaborate with ASML or establish its own production ecosystem from scratch in order to successfully enter the market.